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Semiconductor Surplus/Used Equipment and OEM/2nd Source Spares

Justin BD&L, Inc. is providing you with Surplus/Used Semiconductor Equipment and OEM/2nd Source Spare Parts at a price that will satisfy your reasonable budget in the shortest amount of time. By serving refurbishment, modification, upgrade (scheduler software and hardware), start-up/installation labor service, relocation(decommission, rigging, crating, shipping) for Front-End/Fabrication, Back-End/Assembly, ATE/Automatic Test Equiment and FPD/Flat Panel Display Tools with a business philosophy that pursues the real value of its customers, Justin BD&L, Inc. is now offering you cost-effective solutions to maintain a competitive place in the Semiconductor Manufacturing/Foundry Industry.

Advanced Solutions Provider for Semiconductor and LED Manufacturing Equipment
+ Windows GUI Scheduler Software Solutions for Semiconductor Manufacturing Equipment
+ Process Monitoring and Performance Enhancement Products and Solutions

 
Surplus/Used Equipment
OEM/2nd Source Spares




    Quick Tour to Clean Room Facility 
    Clean Room Lease and Warehousing Service Available

    Clean Room Facility (450kW Power, DIW, PCW, CDA)
    for Equipment Refurbishment/Manufacturing
    near Seoul and Incheon International Airport in Korea

    On-Site Solar Power Generation System for Energy Saving


   Used/Refurbished Equipment Inventory List
   Last updated on September 18, 2017



  For Sale Now - Featured Tools

  Note : Please click  to download Configuration/Specification Files
                              to download Picture Files
                              to download Movie/Video Files
                              to download Technical Datasheet Files



  << Lithography - Flow Monitoring Solutions for Resist Cost Down and Process Failure Avoidance >>

  LithoFlow Flow Sensor (either Fin-Flow or Micro MEMS type) and Monitoring System for
  (Resist Volume Cost Down, Real-Time Process Monitoring with Alarm/Interlock to avoid Process Accident such as Wafer Scraps)

      Photo Resist, SOG/SOD, Solvent (EBR, Back Rinse, Solvent Bath, Cup Rinse, Nozzle Rinse), Develop Solutions, DIW Top Rinse, etc.
      - Available for All Photo Tracks including
         TEL Lithius, Lithius Pro
         Sokudo
         TEL Clean Track Mark 7, Mark 8, ACT 8 or ACT 12
         DNS 60A, 60B, 80A, 80B, SK200W, SK2000.
         SVG 86, 88, 90, 90-S, 90-SE
         Tazmo SEMIX SOG Coater  
      - Multi Recipe Support (MAX 20 Recipes per Dispense Nozzle)
      - Interchangeable with TEL OEM Fin Flow Sensor for TEL Clean Track ACT 8 and ACT 12

      System Details :
      A. Single Tool/Machine Application :
           - USB Connection to 1 Laptop for 1 Tool/Machine
           - MAX 8 Spin Units, 32 Sensors with 4 Interface Controllers via USB Hub (4 Ports)
           - 1 Band Output : 1 Upper Limit (Alarm or Interlock) and 1 Lower Limit (Alarm/Warning or Interlock/Stop)
           - FDC Option Support Available
      B. Multi Tools/Machines Groupware Application :
           - Ethernet Connection to Laptops and Main Server via Access Point and Ethernet Hub
           - MAX 250 Tools interconnected
           - MAX 300 Sensors per Tool (MAX 120 Spin Units) with 15 Interface Controller (1 Main Controller + 1 Add-on Controller)
              which support Both Digital Pulse Sensor Input and Analog Sensor Input
           - MAX 75,000 Sensors (MAX 250 Tools, 30,000 Spin Units) with 3,750 Interface Controllers
           - Multi Bands Outputs : Max 3 Upper & Lower Limit "Alarm/Warning" and 1 Upper & 1 Lower Limit "Interlock/Stop"
           - FDC Option Support Available

      Qualification and Installation Acheivement Records
           Wafer FABs in North America, P.R. China, Japan and Singapore

      Other Applications
          Spin Scrubbing Cleaning System
          Wet Station
          Spin Etch System
          CVD Liquid Gas Flow Monitoring
          CMP Slurry Supply System and Chemical Supply System


       
 

  << Lithography  >>

  Nikon NSR-2205i12D (200mm, 8"), 1 set    
      200mm (8inch) flat zone wafer with Wafer Loader Type2(A3), 6 inch reticle
      Wafer Loader Type2 (A3), Flat Zone Type can be applicable for both Wafer FAB and LED/PSS FAB.
      Currently Power-up in Clean Room, Source Inspection is available in Clean Room Facility
      Nikon OEM original HDD in Work Station and Lens Data available
      U$925,000.00 each (As-is power-up Condition, No Warranty, Where-is)

  Nikon NSR-2205i8A (200mm, 8"), 1 set  
      Currently Vacuum Seal Packaged in Wooden Crate
      Some parts missing (Detailed Missing Parts List is NOT available)
      U$90,000.00 each (As-is Condition, No Warranty, Where-is)

  ASML PAS5500/300C Spare Parts - Lens Unit and Cable Assembly


  [TEL Clean Track ACT 8 Photo Resist Coat and Develop Systems ]

  TEL Clean Track ACT 8 Dual Block (200mm, 8") with SMIF CSB, 4Coat(2COT+2BCT) + 4Develop + 1Interface
       4SUCs, 4 SMIF Indexers, ASML Interfaced, Right to Left Wafer Flow - 2 sets
       U$950,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)
       U$900,000.00 each (As-is cold-down, No Warranty, Where-is)

  TEL Clean Track ACT 8 Dual Block (200mm, 8") with Open Cassette CSB, 3Coat(3COT) + 4Develop + 1Interface
       4UNCs, 4 Uni-Cassettes (Open Cassette) Indexers, Canon DUV Scanner Interfaced, Left to Right Wafer Flow - 1 set
       U$850,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)
       U$800,000.00 each (As-is cold-down, No Warranty, Where-is)
       * Option : New Integrated Type of SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4 SMIF Indexers) is available.

  TEL Clean Track ACT 8 Single Block (200mm, 8") with 2Coat(1COT+1TCT) + 2Develop + 1Interface
       4SUCs, 4 SMIF Indexers Indexers, ASML Interfaced, Right to Left Wafer Flow - 2 sets
       U$550,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)
       U$500,000.00 each (As-is cold-down, No Warranty, Where-is)
       * Option : New Integrated Type of SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4 SMIF Indexers) is available.

  TEL Clean Track ACT 8 Single Block (200mm, 8") with 2Coat(1COT+1TCT) + 2Develop + 1Interface
       4UNCs, 4 Uni-Cassettes (Open Cassette) Indexers, ASML Interfaced, Right to Left Wafer Flow - 2 sets
       U$500,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)
       U$450,000.00 each (As-is cold-down, No Warranty, Where-is)
       * Option : New Integrated Type of SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4 SMIF Indexers) is available.

  TEL Clean Track ACT 8 Single Block (200mm, 8") with 2Coat(1COT+1TCT) + 2Develop + 1Interface
       4UNCs, 4 Uni-Cassettes (Open Cassette) Indexers, Nikon Interfaced, Left to Right Wafer Flow - 1 set
       U$550,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)
       U$500,000.00 each (As-is cold-down, No Warranty, Where-is)
       * Option : New Integrated Type of SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4 SMIF Indexers) is available.

  TEL Clean Track ACT 8 Single Block (200mm, 8") with 2PCT(Polyimide Coat) - 1 set
       * Option : New Integrated Type of SMIF CSB - 3SUCs (3 SMIF Indexers) or 4SUCs (4 SMIF Indexers) is available.


  [TEL Clean Track ACT 12 Photo Resist Coat and Develop Systems ]

  TEL Clean Track ACT 12 Single Block (300mm, 12") with 1Coat + 2Develop + 1Interface - 2 sets
       U$350,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track ACT 12 Single Block (300mm, 12") with 1PCT(Polyimide Coat) and 1PDV(Polyimide Develop) - 1 set
       U$450,000.00 each (As-is, No Warranty, Where-is)


  [TEL Clean Track Mark 8 Photo Resist Coat and Develop Systems ]

  TEL Clean Track Mark 8 Dual Blocks (200mm, 8") with 2C3D1IFB, 2Coat + 3Develop + 1Interface (ASML Stepper, Right to Left Wafer Flow)
       U$200,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 8 Single Block (200mm, 8") with 2Coat +2Develop + 1Interface (ASML Stepper, Right to Left Wafer Flow)
       U$170,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 8 Single Block (200mm, 8") with 2Coat + 2Develop + 1Interface (Nikon Stepper, Left to Right Wafer Flow)
       U$170,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 8 Single Block (200mm, 8") with 2Coat + 1Develop
       U$100,000.00 each (As-is, No Warranty, Where-is)


  [TEL Clean Track ACT 7 Photo Resist Coat and Develop Systems ]

  TEL Clean Track Mark 7 Dual Blocks (200mm, 8") with 2Coat + 3Develop + 1Interface (ASML Stepper, Right to Left Wafer Flow)
       U$185,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Dual Blocks (200mm, 8") with 5 Develop (2Develop + 3Develop), Vintage 2000, 2001
       U$150,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Single Block (200mm, 8") with 1Scrubber + 1Coat + 2Develop + 1Interface (Canon Stepper, Left to Right Wafer Flow)
       U$150,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Single Block (200mm, 8") with 4 Develop, Vintage 1999
       U$125,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Single Block (200mm, 8") with 3 Develop
       U$90,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Single Block (200mm, 8") with 3 Polyimide PIQ Coat
       U$80,000.00 each (As-is, No Warranty, Where-is)
  TEL Clean Track Mark 7 Single Block (200mm, 8") with 2 Coat + 1 Reserve
       U$70,000.00 each (As-is, No Warranty, Where-is)


  [DNS 80A, 80B Photo Resist Coat and Develop Systems ]
  DNS 80B (200mm, 8") Photo Resist Coat & Develop System (1Coat + 2Develop + 1Interface : Coat-Develop-Interface) - 1 set
       U$120,000.00 each (As-is, No Warranty, Where-is)
  DNS 80B (150mm, 6") Photo Resist Develop System (2Develop : Blank-Develop-Develop) - 1 set
       U$85,000.00 each (As-is, No Warranty, Where-is)
  DNS 80A (SKW-80A-BVPE, 200mm, 8") Photo Resist Coat & Develop System (2Develop + 1Coat + 1Interface : Blank-Develop-Develop-Coat-Interface) - 2 sets
       U$45,000.00 each (As-is, No Warranty, Where-is)

  DNS SC-W80A-AVFG (200mm, 8") SOG Coat and Vertical Furnace System (2Coat + 1Vertical Furnace)
  with New Controller and Windows GUI OS based Scheduler Software
      1) All Brand New Conventional Electrical Components (Spin Motor/Driver, Servo Motor/Driver, I/O Boards) and Main Controller
          with New Scheduler Software (Windows GUI OS).
      2) Low TCO/Total Cost of Ownership on Spare Parts
          DNS SS-W80A-AVFG SOG parts are end of production.
      3) Online Communication Option (SECS/GEM, GEM300) in Scheduler Software
          DNS SC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FAB Online Communication.
      4) Advanced Features
          A. Real Time Wafer Log Tracking System per Each Wafer, Auto Back-up System
          B. Wafer Level Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX 25 Recipes per 1 Cassette)
          C. Automatic Wafer Collection Feature
          D. Wireless/WiFi Remote Monitoring Feature
          E. Auto Teaching Feature
          F. Easy Recipe Editing Feature


  << Clean >>

  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 2 Front + 2 Back, Nano Spray - 1 set
  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 2 Front + 2 Back, High Pressure Jet - 1 set
  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Back, High Pressure Jet - 1 set
  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Fronts, Nano Spray - 2 sets
  DNS SS-W80A-AR (200mm, 8") Spin Scrubber, 4 Fronts, High Pressure Jet - 3 sets

  DNS SS-W80A-AR (200mm, 8") Through-put Upgraded Spin Scrubber
  with New Controller and Windows GUI OS based Scheduler Software

      3 Front Sides (Nano-Spray + PVA Brush), 3 Back Sides (Nano-Spray), 2 Reverse Units
      2 Front Sides (Nano-Spray + PVA Brush), 2 Back Sides (Nano-Spray), 2 Reverse Units    

      1) All Brand New Conventional Electrical Components (Spin Motor/Driver, Servo Motor/Driver, I/O Boards) and Main Controller & Touch Panel
          with New Scheduler Software (Windows GUI OS).
      2) Low TCO/Total Cost of Ownership on Spare Parts
          DNS SS-W80A-AVFG SOG parts are end of production.
      3) High Through-put/WPH : 270 Wafers/hour (WPH) for 4 Front Side Configuration (35sec Processing Time per each chamber)
          58.8% increased from WPH of DNS SS-W80A-AR
          22.7% increased from WPH of DNS SS-W80B-AR
      4) High Through-put/WPH : 135 Wafers/hour (WPH) for 2 Front + 2 Back Side Configuration (35sec Processing Time per each chamber)
          35.0% increased from WPH of DNS SS-W80A-AR
          12.5% increased from WPH of DNS SS-W80B-AR
      5) Small Foot Print (No External AC Power Transformer Required.)
      6) Speed Control Feature on Scanning Arm at Scrubbing Units for High Throughput
      7) Online Communication Option (SECS/GEM, GEM300) in Scheduler Software
          DNS SC-W80A, SC-W80B requires additional DNS OEM Hareware and Software License for FAB Online Communication.
      8) Advanced Features
          A. Real Time Wafer Log Tracking System per Each Wafer, Auto Back-up System
          B. Wafer Level Recipe Processing, Multi Recipe/Job Processing per Cassette (MAX 25 Recipes per 1 Cassette)
          C. Automatic Wafer Collection Feature
          D. Flexible Loading/Unloading Option (4 ports)
               User can designate any Cassette Slot/Port as Loading Slot/Port or Unloading Slot/Port
               Note : 25 slots per Cassette (or Port)
          E. Wireless/WiFi Remote Monitoring Feature
          F. Auto Teaching Feature
          G. Easy Recipe Editing Feature
          H. Locking Bar on Cassette Station to avoid Operator's Mistake to pick up Unfinished Lot/Cassette (Non-SMIF only)


  << Etch >>


  AMAT DPS II Metal Etcher (300mm, 12") with 3 DPS II Chambers and 2 Axiom Chambers - 1 set 
       S/N 416521, Vintage 2008  
       U$1,500,000.00 each (As-is, No Warranty, Where-is)

  AMAT Centura WxP (Tunngsten Etch Back) Chambers (200mm, 8"), 4 sets 
       U$30,000.00 each (As-is, No Warranty, Where-is)

  Lam Research Rainbow 4420 Poly/Nitride Etch System (200mm, 8") - 7 sets 
       U$65,000.00 each (As-is, No Warranty, Where-is)

  Lam Research Rainbow 4520 Oxide Etch System (150mm, 6") - 2 sets   
       U$65,000.00 each (As-is, No Warranty, Where-is)

  Novellus-Gasonics A3010 Dry Asher (200mm, 8") - 2 sets     
       U$60,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)


  << CVD >>

  AMAT P5000 PECVD, TEOS with 3 CVD Chambers
      200mm(8"), 1 set  
      U$80,000.00 each (As-is, No Warranty, Where-is)




  << RTP >>

   Mattson AST 3000 RTP (200mm, 8") - 1 set
       S/N 99050526, Vintage 2000, Operational Condition  
       U$400,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)

   Mattson AST 2900 RTP (200mm, 8") - 2 sets
       S/N 2005111091, Vintage 2005, Operational Condition  
       U$350,000.00 each (As-is power-up, Initialized Condition, No Warranty, Where-is)

   Mattson AST 2800 RTP (200mm, 8") - 1 set
       S/N 94060103, Vintage 1994  
       U$180,000.00 each (As-is, No Warranty, Where-is)


  << Metrology >>

   Nicolet ECO-1000s FT-IR - 1 set
       S/N ACO9601046, Vintage 1996  
       U$20,000.00 each (As-is, No Warranty, Where-is)

   SDI SPV-1050 Contamination Monitoring System - 1 set
       S/N 96-060121, Vintage 1996  
       U$20,000.00 each (As-is, No Warranty, Where-is)

   Hitachi S8820HSA CDSEM (200mm, 8") - 1 set
       U$125,000.00 each (As-is, No Warranty, Where-is)




  << Others >>
 
   Asyst Spartan EFEM Wafer Metrology Sorter (300mm, 12") with 2 FOUP ports - 1 set
       S/N 09-3508-001449, Vintage 1997  
       U$150,000.00 each (As-is, No Warranty, Where-is)

   Asyst PST100 SMIF Integrated Wafer Metrology Sorter (200mm, 8") with 2 SMIF Ports and 1 Open Cassette Plate - 2 sets
       Vintage 1996  
       U$100,000.00 each (As-is, No Warranty, Where-is)  

   Axcelis-Fusion GES Dual Chamber UV Stabilizer/Bake (200mm, 8") - 1 set

   Axcelis-Fusion 200PCU Single Chamber UV Stabilizer/Bake (200mm, 8", Bolt-in SMIF) - 1 set

   Axcelis-Fusion (M)200PCU Single Chamber UV Stabilizer/Bake (200mm, 8") - 4 sets




  << Back-End >>

  Heavy Smoker for DFD6361 Dicing Saw System
     1 set, Vintage 2006, Operational Condition 

  NGK Maggcon II, CO2 Bubbler, RCII-2000ACD-S for DFD6361 Dicing Saw System
      1 set, Vintage 2006, Operational Condition 

  Disco DSC141 Spin/Rinse/Drying Cleaner (200mm, 8")
      1 set, Vintage 2006, Operational Condition 

  Nitto-Denko DR8500 II Taper (Taping System, Laminator, Wafer Mounting System)
      200mm(8"), 1 set, S/N K087E94, Vintage 1994   

  Nitto-Denko DR8500 II Taper (Taping System, Laminator, Wafer Mounting System)
      200mm(8"), 1 set, S/N L248E95, Vintage 1995, Some Parts Missing   

  Nitto-Denko HR8500 II Detaper with UV Unit (Tape Remover)
      200mm(8"), 1 set, Vintage 1994, S/N N037H96, Operational Condition     

  Nitto-Denko HR8500 II Detaper (Tape Remover)
      200mm(8"), 1 set, Vintage 1994, NIL Touch Panel Controller Missing  

  Nitto-Denko HR8500 II Detaper (Tape Remover)
      200mm(8"), 1 set, Vintage 1994, Some Parts Missing 

  Takatori ATRM-2100 Detaper (Tape Remover), 200mm(8"), 1 set, Vintage 1997 

  Takatori ATM-8100 Detaper (Tape Remover), 200mm(8"), 1 set, Vintage 1996 


  Lintec RAD2000/F8, UV Irradiator for Detaping System
      S/N D6S-20006-LW, Vintage 1996  


  << ATE >>

  TEL D230 / ADA-K5 Chiller for TEL P-12XL Cold Prober (300mm, 12")   
  U$30,000.00 each (As-is power-up, Working Condition, No Warranty, Where-is)
  Inspection available with Power-up Condition in Clean Room Facility


 << Cryo Pumps and Compressors >>
HELIX CTI-Cryogenetics On-Board 8F Cryo Pump, 15 sets
HELIX CTI-Cryogenetics Cryo Compressor 9600, 4 sets 
     S/N E08754276, Elapsed Time Meter 3,371.1H, He Charge Pressure at On/Off Condition is all within SPEC, @U$7,500.00 each   
     S/N D06456510, Elapsed Time Meter 23,877.9H, He Charge Pressure at On/Off Condition is all within SPEC, @U$7,000.00 each 
     S/N J02119034, Elapsed Time Meter 50,028.4H, He Charge Pressure at On/Off Condition is all within SPEC, @U$6,500.00 each 
     S/N K02119255, Elapsed Time Meter 50,030.8H, He Charge Pressure at On/Off Condition is all within SPEC, @U$6,500.00 each 
HELIX CTI-Cryogenetics Cryo Compressor 8510, 9 sets
HELIX CTI-Cryogenetics Cryo Compressor 8500, 1 set

<< Turbo Modular Pumps and Controllers >>

Edwards - Seiko Seiki MG-STPH600G-T62B, 1 set
Edwards - Seiko Seiki MG-STPH600C-T62C, 1 set
Edwards - Seiko Seiki STP-H600C1, 1 set
Edwards - Seiko Seiki STP301, 3 sets

<< Dry Pumps and Roughing Pumps >>

Edwards iH600, 18 sets
Edwards iH80, 6 sets
Edwards iGX6/100M 200V, 4 sets
Edwards iGX6/100N 200V, 1 set
Edwards iQDP80 + QMB500, 15 sets
Edwards iQDP80 + QMB250, 4 sets
Edwards iQDP80, 11 sets
Edwards QDP80, 2 sets
Edwards QDP80 + QMB500, 1 set
Edwards iQDP40, 6 sets
Edwards QDP40, 4 sets
Edwards Pump Display Module Terminal, 8ea
Edwards Pump Interface Module P/N A52844460, 10ea
Edwards Pump Interface Module P/N D37215000, 11ea
Edwards Pump Interface Module P/N A52844413, 2ea
Edwards Pump Overcurrent Protection Unit P/N A38054210, 1ea
Edwards Pump Overcurrent Protection Unit P/N A38054220, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005, 1ea
Edwards Pump Overcurrent Protection Unit P/N N38054005 with Pump Rack, 1ea
Edward Pump Rack, 10 sets
Ebara 80x25, 3 sets
     S/N DPD-932464, @U$3,000.00 each
     S/N DPD-956237, @U$3,000.00 each
     S/N DPD-956196, @U$3,000.00 each
Ebara 40x20, 2 sets
     S/N DPA-932514, @U$2,000.00 each
     S/N DPA-932586, @U$2,000.00 each
Ebara A150W-T, 3 sets
Ebara A70W, 4 sets
Ebara A30W, 3 sets
Alcatel ADS501, 15 sets
Leybold WSU501, 2 sets
Kashiyama SD90V, 1 set

<< Heat Exchanger >>
AMAT 0 Heat Exchanger (0221-10785 REV B), 1 set
     S/N 33996-01, @U$4,000.00 each 

<< Chiller >>
Lam Research TCU2080 Dual Channel Chiller, 2 sets
M&W RPC2 Dual Channel Chiller, 6 sets
Neslab HX150+W/C Chiller, 5 sets
SMC INR-341-54C Chiller, 2 sets
Cosam BCU-B952LT Chiller, 2 sets
Cosam BCU-E152RSD-AMLR Chiller, 1 set
Cosam BCU-E152RSE-AMAT Chiller, 2 sets
FST FST/C-HS308H Chiller, 1 set
Lasemtech BCU-A512-K Chiller, 1 set
Lasemtech BCU-E110RS-COM Chiller, 3 sets
Speed Engineering SPEED-800A Chiller, 1 set


Refurbishment, Modificiation, Upgrade and Installation/Start-up Service

Justin BD&L, Inc. is a leading solution provider for Refurbishment, Upgrade, Modification and Technical Service for the following tools

  TEL Lithius, Lithius i, Lithius i+, Lithius Pro - 300mm(12") Photo Resist Coat/Develop System
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues  
      Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue  
      Upgraded Wafer Guide Assembly to extend its Life Time.  

  Sokudo RF3, RF3S, RF Duo - 300mm(12") Photo Resist Coat/Develop System
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues  
      Upgraded Wafer Guide Assembly to extend its Life Time.  

  TEL Clean Track ACT 12 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      High Through-put Upgraded PRA, CRA, IRA
      Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues  
      Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue  
      Upgraded Wafer Guide Assembly to extend its Life Time.  

  TEL Clean Track ACT 8 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      New SMIF CSB/Cassette Station Block (3 Indexers Type or 4 Indexers Type)
      High Through-put Upgraded PRA, CRA, IRA

  TEL Clean Track Mark II, V, Vz, 7, 8 Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
      New SMIF CSB/Cassette Station Block (3 Indexer Type)

  DNS SS-W80A-AR, SS-W80B-AR Wafer Spin Scrubbing System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  DNS 636, 629, 60A, 60B, 80A, 80B Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  SVG Photo Resist Coat and Develop System
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  Nikon g-line, i-line, DUV Step/Scanner
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  Ebara EPO2228, FREX200 CMP System
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  KLA-Tencor-Thermawave TP Series and OP Series
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Hitachi S6XXX, S8XXX, S9XXX CDSEM, FESEM and FEI-Philips XL series FESEM
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  AMAT P5000, Centura, Centura II Etch, CVD and Endura 5500 PVD and Mirra CMP System Series
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  Lam Research Rainbow, TCP, A6 Etch System Series
      Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service

  Varian 120XP, 160XP, E1000, 300XP, 350D, E220, E500, VIISta, VIISion Ion Implant System
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Axcelis-Eaton NV6200, NV6200A, NV6200AV, NV10-160, NV10-180, NV-GSD Ion Implant System
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Axcelis-Fusion 150PC, 200PCU, M200PCU Polo, Gemini UV Stabiliztion/Bake System Series
      Full Refurbishment, Start-up/Installation and Warranty Service

  Mattson SHS2800, SHS2900 and AG Associate 4104, 8108 Single Chamber RTP Series
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  All Dry Ashing System : Novellus-Gasonics, Ramco, PSC Series
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  New Automatic, Semi-Auto and Manual Wet Bench/Station

  DNS, Sugai, Kaijo, SES, SEZ and Akrion Wet Station Series
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  New WMS/Wafer Metrology Sorter (up to 300mm wafer size)

  Asyst, Rorze and Other Makers WMS/Wafer Metrology Sorter
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Accretech-TSK (A-PM-90A, UF200, UF200S, UF200SA, UF3000) Prober
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
      Upgraded to Cold Chuck (-40'C) with Chiller
      Modification for Square Type of Probe Card Holder

  TEL (P-8, P-8XL, P-12XL, P-12XLn)
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
      Upgraded to Cold Chuck (-40'C) with Chiller
      Modification for Square Type of Probe Card Holder

  Disco Back Grinder (DFG840, DFG8540)
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Nitto Automatic Taper (Wafer Mounter, Laminator) and Detaper (Tape Remover)
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service

  Disco, K&S and TSK Dicing Saw
      Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service




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Last updated : Oct 2017