Featured Inventory
Note : Please click to download Configuration Files
to download Picture Files
to download Movie/Video Files
to download Technical Datasheet Files
New Arrival
<< Etch >>
AMAT Centura II eMAX Oxide Etcher (Centura II Frame, 3Chs, VHP+) - 8 systems
S/N 300705, Vintage 2000
S/N 300706, Vintage 2000
S/N 300805, Vintage 2000

S/N 305091, Vintage 2000
S/N 305092, Vintage 2000
S/N 317275, Vintage 2000

S/N 320171, Vintage 2000
S/N 320174, Vintage 2001
Lam Research Rainbow 4520 Exelan Stand-alone, 200mm(8inch) - 10 systems
Some Parts Missing, 10 sets of Packaged Sale Only

S/N 2980
S/N 3161
S/N 3194
S/N 3237
S/N 3400

S/N 3546
S/N 3808
S/N 3858
S/N 3866
S/N 24094
Lam Research Rainbow 4420, 200mm(8inch) - 7 systems
Lam Research Rainbow 4520, 150mm(6inch) - 2 systems
Axcelis-Fusion Gemini Dual Chamber Asher - 6 systems
<< CVD >>
AMAT Centura Ultima HDP CVD (3Chs, Some missing) - 1 system

AMAT Centura 5200 WCVD (4 WxZ, MW Lid Type, HP+) - 4 systems
S/N 20383, Vintage 2005
Novellus Concept II Speed HDP CVD (Shrink, 3Chs) - 4 systems
<< RTP >>
Mattson AST 3000 RTP - 1 system
Mattson AST 2900 RTP - 2 systems
Mattson AST 2800 RTP - 1 system
<< PVD/Sputtering >>
Varian M2i PVD System - 5 systems
AMAT Endura5500 Chambers and Spare Modules/Parts Package
AMAT Endura5500 Chambers

- AMAT Endura5500 Wide Body Chamber - 4 systems
- AMAT Endura5500 Standard Water Cooled Body Chamber - 1 system
- AMAT Endura5500 Standard Body Chamber - 3 system
  AMAT Endura5500 Spare Modules and Parts

<< Lithography >>
TEL Clean Track ACT 8 SMIF CSB 4C4D1IFB (4SUCs, 4 SMIF Indexers) - 4 sets
DNS 80B Photo Resist Coat & Develop System (2Coat+3Develop)- 1 system
DNS 80A Photo Resist Coat & Develop System (2Coat+3Develop)- 2 system
DNS 80B Photo Resist Coat & Develop System (2Coat+2Develop)- 1 system
DNS 80B Photo Resist Coat and Develop System (1Coat+2Develop) - 1 system
DNS 80B Photo Resist Developer (2 Develop) - 1 system
<< CMP >>
Ebara EPO2228 Tungsten CMP System - 2 systems
<< Clean >>
DNS SS-W80A-AR, 200mm Spin Scrubber, 2 Front + 2 Back, Nano Spray - 1 systems
DNS SS-W80A-AR, 200mm Spin Scrubber, 2 Front + 2 Back, High Pressure Jet - 1 system
DNS SS-W80A-AR, 200mm Spin Scrubber, 4 Back, High Pressure Jet - 1 systems
DNS SS-W80A-AR, 200mm Spin Scrubber, 4 Fronts, High Pressure Jet - 3 systems
DNS SS-W80A-AR, 200mm Spin Scrubber, 4 Fronts, Nano Spray - 2 systems
<< Metrology >>
KLA-Tencor Surfscan 6220 Non-Patterned Wafer Defect/Particle Inspection System - 1 system
Rudolph FE-VII/D Film Thickness Measurement System - 1 system
Nicolet ECO-1000s FT-IR - 1 system
SDI SPV-1050 Contamination Monitoring System - 1 system
August CV-9800 Cassette Inspection System - 1 system
For Sale Now
<< Lithography >>
TEL Clean Track ACT 8 SMIF, DUV Process, 200mm(8"), Photo Resist Coat and Develop System, 4 sets
SMIF CSB (4 SUCs SMIF Indexer Type), Double Blocks (2 Coat, 2 BARC, 4 Develop)
Interface to ASML Scanner, Right to Left Wafer Flow
SMIF CSB (3 SUCs SMIF Indexer Type) Modification also available upon request
Power-Up and Operational Condition
TEL Clean Track ACT 8, 200mm(8"), DUV Process, Photo Resist Coat and Develop System, 1 set
Standard Uni Cassette CSB, Double Blocks (3 Coat, 4 Develop)
Interface to Canon ES3 Scanner, Left to Right Wafer Flow
SMIF CSB (3 SUCs or 4 SUCs) Modification also available upon request
Power-Up and Operational Condition
TEL Clean Track ACT 8, 200mm(8"), DUV Process, Photo Resist Coat and Develop System, 4 set
Standard Uni Cassette CSB, Single Block (2 Coat, 2 Develop)
Interface to ASML, Canon Stepper, Right to Left Wafer Flow
SMIF CSB (3 SUCs or 4 SUCs) Modification also available upon request
Power-Up and Operational Condition
TEL Clean Track ACT 8, 200mm(8"), DUV Process, Photo Resist Coat and Develop System, 1 set
Standard Uni Cassette CSB, Single Block (2 Coat, 2 Develop)
Interface to Nikon Stepper, Left to Right Wafer Flow
SMIF CSB (3 SUCs or 4 SUCs) Modification also available upon request
Power-Up and Operational Condition
TEL Clean Track ACT 12, 300mm(12"), Polyimide Coat and Develop System, 1 set
FOUP CSB (4 Indexer Type), Single Block, Stand Alone, No Interface Unit, Left to Right Wafer Flow
1 PCT Unit with Entegris-Mykrolis Encompass Pump, 1 Develop, Vacuum Chuck PRA
Power-Up and Operational Condition, Vintage 1999
<< Clean >>
DNS SS-W80A-AR or SS-W80B-AR Through-put Upgraded Spin Scrubber
with New Controller and Windows GUI OS based Scheduler Software
2 Front Sides (Nano-Spray + PVA Brush), 2 Back Sides (Nano-Spray), 2 Reverse Units

1) Remanufactured System with All Brand New Conventional Electrical Control Components, Main Controller
and New Scheduler Software (Windows GUI). Low TCO/Total Cost of Ownership
All DNS 80A, 80B spin scrubber parts are end of production. New System does not need DNS OEM Parts at all.
2) High Through-put/WPH : 270 Wafers/hour (WPH) for 4 Front (35sec per each chamber)
58.8% increased from WPH of DNS SS-W80A-AR
22.7% increased from WPH of DNS SS-W80B-AR
3) High Through-put/WPH : 135 Wafers/hour (WPH) for 2 Front + 2 Back (35sec per each chamber)
35.0% increased from WPH of DNS SS-W80A-AR
12.5% increased from WPH of DNS SS-W80B-AR
4) Small Foot Print (No External AC Power Transformer Required.)
5) Adjustable Speed of Scanning Arm at Scrubbing Units for High Throughput
The Moving Speed of Scanning Arm could be increased or adjusted by Software Access
6) High Pressured Nano Spray Scrubbing Methods
Alternative Scrubbing Methods against High Pressure Jet Nozzle Scrubbing
not to damage the Circuits on Front Side of the Wafer.
It does not require any additional High Pressure Unit
7) Online SECS/GEM Compatible ?Built-in Software
DNS SS-W80A-AR, DNS SS-W80B-AR need have special H/W for FAB Online Communication.
8) Windows Based GUI OS, High Speed Processor Touch Panel Dispaly and PC Controller
9) High-End Functional Operation
A. Real Time Process and User Log Tracking System per Each Wafer, Auto Back-up System
B. Multi Recipe/Job Featured per Cassette (MAX 25 Recipes per 1 Cassette)
C. Flexible Loading Port (4 ports) and Unloading Port (4 ports)
User can designate any Cassette Slot/Port as Loading Slot/Port or Unloading Slot/Port
Note : 25 slots per Cassette (or Port)
D. Wireless/WiFi Touch Panel Controller for Easy Maintenance
E. Auto Teaching
F. Easy Recipe Editing Feature
G. Locking Bar to avoid Operator's Mistake to pick up Unfinished Lot/Cassette (Non-SMIF only)
Movie Files #1 - DNS SS-W80B-AR, Upgraded High Speed Robot(INR, WTR)
Movie Files #2 - DNS SS-W80B-AR, Upgraded High Speed Robot(INR, WTR),
SSW(Front Side, High Pressure Nano-Spray), Reverse Unit
Movie Files #3 - DNS SS-W80B-AR, SSW(Front Side, High Pressure Nano-Spray), Reverse Unit
Movie Files #4 - DNS SS-W80B-AR, SSR(Back Side, High Pressure Nano-Spray), Reverse Unit
<< CVD >>
AMAT Centura 5200 WCVD, 200mm(8") w/ 3 WCVD Chambers (Dielectric PECVD, Lamp Heated Type)
200mm(8"), 1 set

AMAT Centura 5200 PECVD, 200mm(8") w/ 3 CVD Chambers (Lamp Heated Type) and Centura 5300 Controller
200mm(8"), 1 set

<< Back-End >>
Disco DFD640 Dicing Saw System
200mm(8"), 1 set, Vintage 1997, Operational Condition

Nitto-Denko DR8500 II Taper (Taping System, Laminator, Wafer Mouting System)
200mm(8"), 2 sets, Vintage 1994 & 1995, Some Parts Missing

Nitto-Denko HR8500 II Detaper (Tape Remover)
200mm(8"), 1 set, Vintage 1994, Some Parts Missing

Takatori ATRM-2100 Detaper (Tape Remover), 200mm(8"), 1 set, Vintage 1997

Takatori ATM-8100 Detaper (Tape Remover), 200mm(8"), 1 set, Vintage 1996

<< ATE >>
TEL P-8 Prober w/ Manipulator, 200mm(8"), 20 sets, Vintage 1996,1997,2000,2001
Hot Chuck (Nickel), OCR, VIP Board
Justin BD&L, Inc.'s Newly Developed/Manufactured Photo Resist Coat/Develop System
1. Customized Design for 2"/3"/4"/5"/6"/8"/12" for Si/GaAs/SiGe/Quartz/Glass Wafer, etc.
2. g-Line, i-Line or Deep UV Application
3. Vertical Type of Multi Coat and Multi Develop System
4. Manual, Semi-Auto and Full Automatic Operation System
5. Multiple Syringe Dispense System
6. Portable Photo Resist Dispense System
7. PR, HMDS, Solvent and Develop Supply System
8. T&H Control System, Forced Drain Option
9. Coat/Develop Exhaust MFC
10. FFU/Fan Filter Unit
11. Chemical Filter Unit for Deep UV Process
12. Hot Plate, Cool Plate, PEB Plate
13. Resist Dispense Moniotring System
14. Bubble Monitoring System
15. On-line Communication Features
16. Accessary Units : Degas Module, Fin Flow Sensor, etc.
Refurbishment, Modificiation, Upgrade and Installation/Start-up Service
Justin BD&L, Inc. is a leading Refurbishment/Upgrade/Modification Technical Service Company for
TEL Clean Track Mark 7, Mark 8, ACT 8 and ACT 12 Photo Resist Coat/Develop System
DNS SS-W80A-AR, SS-W80B-AR Spin Scrubber/Scrubbing Clean System
Ebara EPO222(EPO2226, EPO2228), FEX200, FEX300 CMP/Chemical Mechanicl Planarization System
DNS SS-W80A-AR, SS-W80B-AR Spin Scrubber/Scrubbing Clean System
TEL Lithius, Lithius i, Lithius i+, Lithius Pro - 300mm(12") Photo Resist Coat/Develop System
Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues

Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue

Upgraded Wafer Guide Assembly to extend its Life Time.

Sokudo RF3, RF3S, RF Duo - 300mm(12") Photo Resist Coat/Develop System
Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues

Upgraded Wafer Guide Assembly to extend its Life Time.

TEL Clean Track ACT 12 Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
High Through-put Upgraded PRA, CRA, IRA
Upgraded Oven Exhaust to extend PM frequency and Minimize Coating Failure Issues

Upgraded Catch Cup for Coat Unit to extend PM frequency and Minimize Coating Failure Issue

Upgraded Wafer Guide Assembly to extend its Life Time.

TEL Clean Track ACT 8 Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
New SMIF CSB/Cassette Station Block (3 Indexers Type or 4 Indexers Type)
High Through-put Upgraded PRA, CRA, IRA
New Real Time GUI Controller/Software for
TEL Clean Track Mark 7, Mark 8 Photo Resist Coat and Develop System
Slot by Slot Recipe Control ((25 Recipes for 25 Wafers/Cassette), Wafer Reclaim
Real Time Monitoring & Process Log per Wafer
Group Control/Monitoring, Faster Data Computing for Higher WPH
TEL Clean Track Mark II, V, Vz, 7, 8 Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
New SMIF CSB/Cassette Station Block (3 Indexer Type)
TEL Crystal Spinner CS500 FPD/Flat Panel Display Spin Coat System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
TEL Crystal Spinner CS500 FPD/Flat Panel Display Spin Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
DNS SS-W80A-AR, SS-W80B-AR Wafer Spin Scrubbing System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
DNS 636, 629, 60A, 60B, 80A, 80B Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
SVG Photo Resist Coat and Develop System
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
Nikon g-line, i-line, DUV Step/Scanner
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
Ebara EPO2228, FREX200 CMP System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
KLA-Tencor-Thermawave TP Series and OP Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Hitachi S6XXX, S8XXX, S9XXX CDSEM, FESEM and FEI-Philips XL series FESEM
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
AMAT P5000, Centura, Centura II Etch, CVD and Endura 5500 PVD and Mirra CMP System Series
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
Lam Research Rainbow, TCP, A6 Etch System Series
Spare Parts, Full Refurbishment, Modification, Upgrade, Start-up/Installation and Warranty Service
Varian 120XP, 160XP, E1000, 300XP, 350D, E220, E500, VIISta, VIISion Ion Implant System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Axcelis-Eaton NV6200, NV6200A, NV6200AV, NV10-160, NV10-180, NV-GSD Ion Implant System
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Axcelis-Fusion 150PC, 200PCU, M200PCU Polo, Gemini UV Stabiliztion/Bake System Series
Full Refurbishment, Start-up/Installation and Warranty Service
Mattson SHS2800, SHS2900 and AG Associate 4104, 8108 Single Chamber RTP Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
All Dry Ashing System : Novellus-Gasonics, Ramco, PSC Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
New Automatic, Semi-Auto and Manual Wet Bench/Station
DNS, Sugai, Kaijo, SES, SEZ and Akrion Wet Station Series
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
New WMS/Wafer Metrology Sorter (up to 300mm wafer size)
Asyst, Rorze and Other Makers WMS/Wafer Metrology Sorter
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Disco Back Grinder (DFG840, DFG8540)
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Nitto Automatic Taper (Wafer Mounter, Laminator) and Detaper (Tape Remover)
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
TSK (A-PM-90A, UF200, UF200S, UF200SA), TEL (P8, P8XL), EG Probe Station
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
Upgraded to Cold Chuck (-40'C) with Chiller
Modification for Square Type of Probe Card Holder
Disco, K&S and TSK Dicing Saw
Spare Parts, Full Refurbishment, Modification, Start-up/Installation and Warranty Service
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